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Figure 4
Filtering thickness (Al filter) necessary for minimum swelling as a function of PMMA thickness. Series 1: exposure with a 2 µm-thick Si mask membrane and CAMD ring operating at 1.3 GeV. Series 2: exposure with free-standing mesh mask and CAMD ring operating at 1.5 GeV. The accuracy of the filter thickness is within 3 µm as this was our increment for filtering addition. For the accuracy of swelling measurements, see §2[link].

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 10| Part 3| April 2003| Pages 272-279
doi:10.1107/S0909049503005971
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