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![[Figure 5]](sl2009fig5mag.jpg)
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Figure 5
Variation of exposure time as a function of PMMA thickness. A 2 µm-thick silicon membrane was used for exposure of the non-annealed PMMA samples on beamline XRLM3, scan length 2.25 cm. The shapes of the points indicate the energy E and average electron current (Avg. I) of operation of the CAMD storage ring as well as filtering conditions. Squares: E = 1.3 GeV, Avg. I = 150 mA, best filter thickness for minimum swelling indicated on the graph; the two first square points corresponding to less than 150 µm-thick resist did not need filtering. Diamonds: E = 1.3 GeV, Avg. I = 150 mA, no filter. Triangles: E = 1.5 GeV, Avg. I = 90 mA, no filter. |
![[Figure 5]](sl2009fig5.jpg)
 | JOURNAL OF SYNCHROTRON RADIATION |
ISSN: 1600-5775
