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Figure 7
Absorption length of PMMA as a function of incident photon energy. In this graph (Khan Malek et al., 1998BB11) the absorption lengths as a function of monochromatic photon energies were calculated from mass attenuation coefficients tabulated for the photoelectric effect and Compton scattering (at higher energies) by the National Institute of Standards and Technology (NIST) (https://physics.nist.gov/PhysRefData/XrayMassCoef/ ). In reality, with the synchrotron radiation spectrum being broadband, a range of absorption depths exists within the resist. The critical energies (Ec) of CAMD photon spectra from bending magnets of the storage ring operated at 1.3 and 1.5 GeV electron energies are indicated by vertical lines 1 (Ec = 1.7 keV) and 2 (Ec = 2.6 keV), respectively, and from the wiggler superconducting magnets at 7.5 T by line 3 (Ec = 11.2 keV).

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 10| Part 3| April 2003| Pages 272-279
doi:10.1107/S0909049503005971
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