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Figure 6
Top: the (116) powder diffraction peak of a 6 µm Al2O3 thin film, measured at 30 keV. The sample surface was tilted by different angles ψ relative to the scattering plane. The asymmetry in the peaks at different tilt angles can be used to determine the stress depth profile shown in the bottom panel.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 13| Part 6| October 2006| Pages 421-425
doi:10.1107/S0909049506032559
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