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Figure 5
Effect of slit setting on beam size at the sample position in the (a) vertical and (b) horizontal directions. The slits were 230 mm upstream of the sample position. The beam size was recorded at the sample position using a knife-edge scan as described in the text. The minimum setting of the slits was 13 µm, but beams of this size were not achievable at the sample position when the slits defined the beam. In contrast, the mini-beam size is almost constant over a wide range of upstream slit settings for beams defined by the 5 µm and 10 µm mini-beam collimators.

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