Figure 5
Calculated efficiency of blazed and lamellar gratings in the first diffraction order with N = 800 lines/mm and 2000 lines/mm in the case of an ideal 90° apex angle (solid lines) and a realistic obtuse one (dashed lines) as shown on the right. The profile parameters are optimized for the energy 930 eV and Cff = 2.25. The blazing has a larger effect at smaller N. |