Figure 10
Simulated spot sizes for the parabolic L-shaped laterally graded multilayer mirror. The images were taken at 10 m from the mirror. The pixel size is approximately 2 µm × 2 µm. The acceptance is 5 mrad × 5 mrad, the source sizes are (a) 25 µm × 25 µm and (b) 32 µm × 32 µm. Slope error = 10 µrad, σ = 0.2 nm, Δd/d = 7 × 10−4. |