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Figure 2
(a) L-shaped laterally graded multilayer mirror (Montel optics) showing the two surfaces (1 and 2). (b) Long trace profile measurements taken at 5 mm from the junction of the entire length of the L-shaped laterally graded multilayer mirror surface (surface 1). There is a noticeable periodicity in the millimeter range on these surfaces. (c) Power spectral density (PSD) (excluding the regions close to the edges), showing that the periodicity has a fundamental frequency of 2.36 × 10−1 mm−1 (4.22 mm) and a first harmonic of 4.74 × 10−1 mm−1 (2.11 mm). However, the RMS slope error (∼8.5 µrad) is within the specifications.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
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