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Figure 11
Sketch of the UHV chamber system in the P08 preparation laboratory with the following chambers: Storage and degassing (A), preparation (B) and analysis chamber (C), load lock (D) and baby chamber system (E). |
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Figure 11
Sketch of the UHV chamber system in the P08 preparation laboratory with the following chambers: Storage and degassing (A), preparation (B) and analysis chamber (C), load lock (D) and baby chamber system (E). |