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Figure 10
The HEG grating efficiency was measured to be extremely low. AFM measurements suggest that this might be due to a non-triangular profile and strong variation from groove to groove (Fig. 6[link]). Calculations (solid lines) using a representative groove shape taken from one period of the AFM measurements cannot fully explain the reduced efficiency, owing to significant groove-to-groove variation.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 20| Part 2| February 2013| Pages 272-285
doi:10.1107/S0909049512051266
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