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Figure 9
Measured and calculated efficiencies for the MEG grating. The difference between the nominal and actual efficiency is explained by a higher blaze angle (1.95° instead of 1.48°), the presence of a 1.0 nm oxide layer, and 0.1 nm RMS surface roughness. A 1 nm MgF2 coating (dashed lines) could have protected the grating from oxidation.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 20| Part 2| February 2013| Pages 272-285
doi:10.1107/S0909049512051266
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