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Figure 2
ML-BSs having (a) compressive stress in the ML as measured on Si stress wafers (Γ = 0.4), (b) zero-stress ML, and (c) ∼100 MPa tensile stress in the ML. |
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Figure 2
ML-BSs having (a) compressive stress in the ML as measured on Si stress wafers (Γ = 0.4), (b) zero-stress ML, and (c) ∼100 MPa tensile stress in the ML. |