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Figure 8
Two-dimensional map of the surface shape of three different uncoated SiN membranes. The vertical scale (in nm) is marked with a colorbar. The P–V and r.m.s. values are given in Table 4 ![]() |
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Figure 8
Two-dimensional map of the surface shape of three different uncoated SiN membranes. The vertical scale (in nm) is marked with a colorbar. The P–V and r.m.s. values are given in Table 4 ![]() |