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Figure 17
Change in the focused FWHM beam diameter as a function of distance downstream from the FZP. The tightest focus at 740 mm has a FWHM width of 1.32 µm (see inset). |
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Figure 17
Change in the focused FWHM beam diameter as a function of distance downstream from the FZP. The tightest focus at 740 mm has a FWHM width of 1.32 µm (see inset). |