Figure 10
Ray tracings at the exit slit plane at 1000.0 eV with various position of the virtual light source: (a) at the midpoint of two EPUs, (b) at the optimized position (−951 mm) and (c) at the optimized position (−951 mm) and the X blades located at 41.45 m. Surface error data #1 on the grating and surface error data #2 on the plane mirror are introduced. |