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![[Figure 5]](fv5039fig5mag.jpg)
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Figure 5
Contour plots of the surface error data of two real grating substrates, which were fabricated and tested by Zeiss: (a) data #1 and (b) data #2. |
![[Figure 5]](fv5039fig5.jpg)
 | JOURNAL OF SYNCHROTRON RADIATION |
ISSN: 1600-5775
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Figure 5
Contour plots of the surface error data of two real grating substrates, which were fabricated and tested by Zeiss: (a) data #1 and (b) data #2. |
| JOURNAL OF SYNCHROTRON RADIATION |
