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Figure 1
(a) Etched structure of an in situ grazing-incidence X-ray scattering micro-reactor flow cell before anodic bonding of the Pyrex lid and dicing to reveal the silicon windows. The gas inlets (1) and (2), the bypass (3), the capillary to the mass spectrometer (4), 10 µm-thick entrance and exit windows (5) and (6), beam path without supporting pillars (7) and supporting pillars to avoid reactor chamber collapse when working at lower than ambient pressure (8) are labelled on the image. (b) Close-up of the 10 µm-thick Si entrance window and pillar structure of an anodic-bonded closed reactor template before etching and dicing. (c) Schematic representation of the micro-reactor device.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 23| Part 2| March 2016| Pages 455-463
https://doi.org/10.1107/S1600577516001387
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