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Figure 5
Schematic representation of the geometry of the in situ GISAXS/GIWAXS experiment with the incident beam entering the reactor chamber under an incident angle of αi = 0.2° through the 10 µm-thick Si entrance window in the middle of the reaction chamber where no support pillars are blocking the incident or scattered beam. The in-plane GISAXS and the out-of-plane GISAXS up to an angle of αf = 0.30° are transmitted through the 10 µm-thick Si exit window. The GIWAXS is transmitted through the lid which has been thinned to approximately 20 µm.

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ISSN: 1600-5775
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