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Figure 1
Top and front views of the setup are shown in the upper and middle tiers, respectively. The soft X-ray spectrometer is connected on the right-hand side of the target chamber. The TMP is connected on the left-hand side. One differential pumping stage (DPS) is placed between the outgoing flange of the beamline and the entrance flange of the target chamber. The second DPS is introduced between the target chamber and VLS grating chamber. The total length in this configuration is 690 mm. The enlargement at the bottom shows the setup with a running jet.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 24| Part 1| January 2017| Pages 302-306
https://doi.org/10.1107/S1600577516016611
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