Figure 2
Profile of diffraction patterns of different Fresnel numbers. The color bar indicates the normalized amplitude. The number of peaks (red) at the profile can predict the Fresnel number. The Fresnel numbers of the probe-mask used in this work are marked as Mask 1 (Fh = 6.6, Fv = 2.3), Mask 2 (Fh = 17.8, Fv = 3.5) and Mask 3 (Fh = Fv = 57.8) and their pattern profiles are observed at the bottom. |