Coherent X-ray beam metrology using 2D high-resolution Fresnel-diffraction analysis

Ruiz-Lopez, M.; Faenov, A.; Pikuz, T.; Ozaki, N.; Mitrofanov, A.; Albertazzi, B.; Hartley, N.; Matsuoka, T.; Ochante, R.; Tange, Y.; Yabuuchi, T.; Habara, T.; Tanaka, K.A.; Inubushi, Y.; Yabashi, M.; Nishikino, M.; Kawachi, T.; Pikuz, S.; Ishikawa, T.; Kodama, R.; Bleiner, D.

doi:10.1107/S1600577516016568

Journal of Synchrotron Radiation Journal of
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Figure 6
Beam FWHM of the experimental probe-masks. Best match obtained between the divergence of the experimental patterns and the computational patterns. The average is $[\theta_{\rm{div}}]$ = 2.3 µrad and the standard deviation is ±0.4 µrad.

JOURNAL OF
SYNCHROTRON
RADIATION

ISSN: 1600-5775

Volume 24| Part 1| January 2017| Pages 196-204

https://doi.org/10.1107/S1600577516016568

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