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Figure 11
Wavefront slope error (top panel) and height profile (bottom panel) of a Si wafer coated with 10 nm Ir on top of 5 nm Mo and 15 nm B4C. The wavefront slope error from the monochromated synchrotron beam incident on the multilayered sample is shown for comparison (top panel).

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
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