Figure 7
Wavefront slope error (vertical offset of 1 µrad) and monochromator height profile (vertical offset of 0.1 nm) obtained from moiré patterns recorded at different fractional Talbot orders showing that the spatial resolution of the measurement decreases with increasing fractional Talbot order. Details of the recorded moiré patterns are shown in the left-hand panel for two selected fractional Talbot orders. The ninth fractional Talbot order was not accessible because of the arrangement of the holders. |