Figure 2
(a) Photograph of the air-spindle soft X-ray chopper apparatus. The X-ray beam passes from left (upstream) to right (downstream). (1) Rotation axis. (2) Air inlet for axis cooling. (3) Air inlet for spindle. (4) Pumping port for second stage [see (b), turbo-molecular pump]. (5) Pumping port for first stage [see (b), scroll pump]. (6) X–Y–θ stage. (7) Upstream port, with 5 mm-diameter aperture. (8) Same as (7) but for downstream. (9) Port for PIN photodiode. (b) Cross-sectional view of the differential pumping system of the rotational axis. The part shown in light blue is the rotator, and that shown in yellow is the coated and polished wall for the air spindle. |