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Figure 5
Schematic diagram (not in scale) of a fabricated circular A-FZP (left) and a 1D A-FZP (right). Top: top view. Bottom: cross-sectional view. OEZ: over-etched zones. UEZ: under-etched zones. The etching condition was optimized so that the 388th zone might be just 1 µm thick. Therefore, inner zones than the 387th zone are over-etched resulting in an even zone thickness of 1 µm, and outer zones are under-etched resulting in a gradually decreasing zone thickness due to the micro-loading effect.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 24| Part 3| May 2017| Pages 586-594
https://doi.org/10.1107/S1600577517003289
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