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Figure 3
Non-linear CTE of Si and thermal strains of Si, W and B4C (left), and in-plane layer stresses versus temperature with Tref = 293 K (right), showing results compared between FEA and theoretical calculation. |
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Figure 3
Non-linear CTE of Si and thermal strains of Si, W and B4C (left), and in-plane layer stresses versus temperature with Tref = 293 K (right), showing results compared between FEA and theoretical calculation. |