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Figure 5
Relationship between the calculated beam size and the target beam size (w) at 10, 15 and 20 keV, from measurement (points) and from simulation (lines). The beam size was defined as the full width at one-fifth maximum. |
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Figure 5
Relationship between the calculated beam size and the target beam size (w) at 10, 15 and 20 keV, from measurement (points) and from simulation (lines). The beam size was defined as the full width at one-fifth maximum. |