Normal tracing deflectometry using a secondary light source

Peng, C.Q.; He, Y.M.; Wang, J.

doi:10.1107/S1600577517007135

Journal of Synchrotron Radiation Journal of
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Figure 12
Zemax simulation system of the NT method with a point secondary light source. (a) Schematic of the verification system designed in the non-sequential mode of Zemax. (b) Angle errors $[\Delta\theta]$ = $[{\theta}^{\,\prime}-\theta]$ obtained from Zemax simulations within an angle range of ±5 mrad. θ is the angle variation of the mirror, θ′ is the measured angle of the NT method and the aperture of the pinhole is 1 mm.

JOURNAL OF
SYNCHROTRON
RADIATION

ISSN: 1600-5775

Volume 24| Part 4| July 2017| Pages 765-774

https://doi.org/10.1107/S1600577517007135

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