Normal tracing deflectometry using a secondary light source

Peng, C.Q.; He, Y.M.; Wang, J.

doi:10.1107/S1600577517007135

Journal of Synchrotron Radiation Journal of
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Figure 6
Position of the measured area on a SUT using the NT method. Here, p₁ and p₂ are measured positions on the SUT, and d_cc, d_pp, h, $[h^{\,\prime}]$ and $[\beta]$ are the pinhole distance of the measured area at position p₁ and p₂, the horizontal distance from p₁ to p₂, the distance from the pinhole to the SUT, the distance for calculating the precise position of the measured area, and the slope difference of p₁ and p₂, respectively.

JOURNAL OF
SYNCHROTRON
RADIATION

ISSN: 1600-5775

Volume 24| Part 4| July 2017| Pages 765-774

https://doi.org/10.1107/S1600577517007135

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