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Figure 6
(a) FFT spectrum of the sample stage in the X direction. (b, c) Gaussian fittings of horizontal and vertical line plots give full width at half-maximum focus sizes of 26 nm and 25 nm, respectively. (d) The reconstructed focused beam. (e) The reconstructed phase of a star test pattern. The width of the finest inner spokes is 100 nm. Some of the inner spokes have collapsed (the thickness of an Au test pattern is 800 nm), which can also be seen in the SEM image, shown as an inset in (d).

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 24| Part 6| November 2017| Pages 1113-1119
https://doi.org/10.1107/S1600577517011183
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