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Figure 9
SHADOW ray-tracing calculations using surface 48 of Table 1[link] over a geometrical aperture Ax of 63.600 µm. The source is a Gaussian with a root mean square width of 0.1 µm. (a, c) Profiles of source and of focal spots produced by the cubic curve, the paraxial conic section (ellipse/hyperbola) and the parabola for [\delta] = +3.2×10-6 and [\delta] = -3.2×10-6, respectively. (b, d) FWHM of focal spots produced by the cubic curve, the paraxial conic section (ellipse/hyperbola) and the parabola for [\delta] = +3.2×10-6 and [\delta] = -3.2×10-6, respectively, as a function of distance along the beam from the nominal focus. See text for details.

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