Journal of Synchrotron Radiation
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Figure 1
Reflection spectra (
a
) and TEY spectra (
b
) measured in the vicinity of the oxygen edge at different glancing angles for 5 nm-thick HfO
2
film.
JOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 25
|
Part 1
|
January 2018
|
Pages 232-240
https://doi.org/10.1107/S1600577517016253
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access
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