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Figure 1
Reflection spectra (a) and TEY spectra (b) measured in the vicinity of the oxygen edge at different glancing angles for 5 nm-thick HfO2 film. |
Open
access
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Figure 1
Reflection spectra (a) and TEY spectra (b) measured in the vicinity of the oxygen edge at different glancing angles for 5 nm-thick HfO2 film. |