Figure 4
(a) TEY spectra of the 5 nm-thick HfO2 film for different glancing angles calculated within the simple model and normalized to N(θ,ω) using derived optical constants. (b) The absorption spectrum μ(ω) derived from the optical constant k(ω) is shown by a bold line. The measured TEY spectra (Fig. 1b) normalized to N(θ,ω) calculated using measured R(θ,ω) (Fig. 1a). |