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Figure 11
AFM topography measurement on a 600 lines mm−1 blazed grating manufactured with the GTM-6. Top: surface profiles of the grating before (dashed line) and after (solid line) ion beam treatment. Bottom: 3D visualization of the corresponding AFM measurement after IBE.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 25| Part 1| January 2018| Pages 91-99
https://doi.org/10.1107/S1600577517015600
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