view article
Figure 12
Ion beam figuring system at HZB equipped with a 2D-scanning HF source. The insert in the bottom right-hand corner shows the HF source in a tilted position. The total tilt-range is ±30°.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 25| Part 1| January 2018| Pages 91-99
https://doi.org/10.1107/S1600577517015600
Follow J. Synchrotron Rad.
Sign up for e-alerts
E-alerts
Follow J. Synchrotron Rad. on Twitter
Twitter
Follow us on facebook
Facebook
Sign up for RSS feeds
RSS