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Figure 12
Ion beam figuring system at HZB equipped with a 2D-scanning HF source. The insert in the bottom right-hand corner shows the HF source in a tilted position. The total tilt-range is ±30°. |
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Figure 12
Ion beam figuring system at HZB equipped with a 2D-scanning HF source. The insert in the bottom right-hand corner shows the HF source in a tilted position. The total tilt-range is ±30°. |