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Figure 2
Comparison of the groove state by means of AFM measurements on a 600 lines mm−1 grating with 2° blaze angle. (a) Groove profile before (red curve) and after coating with 30 nm Au (black curve). (b) Micro-roughness before and after coating as measured on one groove section for a field of view of 8 µm × 1 µm. These measurements were performed with a Bruker-SIS-Ultraobjective AFM.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 25| Part 1| January 2018| Pages 91-99
https://doi.org/10.1107/S1600577517015600
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