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Figure 4
Top: laminar grating (300 lines mm−1 groove density) for the I08 SXM beamline at Diamond; patterned resist on a Si substrate of length 150 mm. Bottom: AFM profile measurement at the laminar grating; footprint and AFM profile showing 20 nm groove depth.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 25| Part 1| January 2018| Pages 91-99
https://doi.org/10.1107/S1600577517015600
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