Figure 3
Examples of images showing the damage of the 0.7° blazed grating Pt-coated sample caused by 1000 shots of the focused X-ray beam (effective area 400 µm2) at a grazing incidence of 1.24°. The images were taken with a Zeiss LEO 1560 scanning electron microscope. Different imprints correspond to beam transmission values in the range 0.13–1.4%. |