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Figure 3
Results of an AFM measurement on grating G1-3 (a) and grating G2-3 (b), showing the blaze profile and the state of the micro-roughness on the grooves. |
Open
access
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Figure 3
Results of an AFM measurement on grating G1-3 (a) and grating G2-3 (b), showing the blaze profile and the state of the micro-roughness on the grooves. |