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Figure 5
Deviation of the local thickness values normalized by the mean value of a Pt coating. The thickness values are determined at 24 positions (squares) over an optical area of 500 mm by 60 mm. The mean value amounts to 34.2 nm (in the center). The PV value is 1.04 nm over the whole aperture, which is approximately 3%. The colored z-scale is the normalized layer thickness difference given by (t − tm)/tm, where tm is the mean thickness and t is the measured local thickness. Contour lines were interpolated in order to show the changes. The values of normalized difference slightly decrease towards the outer regions of the optical area.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 25| Part 1| January 2018| Pages 116-122
https://doi.org/10.1107/S1600577517016095
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