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Figure 10
XPS data inside and outside the Mo/Si l1n9 spot: (a) and (b) show the Si 2p and O 1s spectra measured in the spot position and at the distance of 0.75 and 8.3 mm from the centre of the irradiated spot. (c) shows the decomposition of Si 2p spectra, and (d) the atomic concentration of the elements versus distance from the irradiation centre.

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