Journal of Synchrotron Radiation
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Figure 7
Detailed EUV reflectivity scans inside and outside the l1n9 spots: (
a
) for Ru an angle of incidence scan at fixed wavelength of 13.5 nm and (
b
) for Mo/Si a wavelength scan at a fixed angle of incidence of 73.75°.
JOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 25
|
Part 1
|
January 2018
|
Pages 77-84
https://doi.org/10.1107/S1600577517017362
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access
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