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Figure 3
Etching rate of quartz from the top surface as well as from the sides. The side-etching rate quoted here is from both sides of the groove, half of that would correspond to the etching rate from one side of a step. The inset shows an image of a small part of the diced wafer before etching.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 25| Part 2| March 2018| Pages 373-377
https://doi.org/10.1107/S1600577517018185
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