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Figure 2
Laboratory characterization of the piezo scanner. (a) Resolution measurements, 10 nm steps in the X-, Y- and Z-directions directly measured using interferometry. (b) Repeatability measurements, 1 µm steps in the X-direction performed with the fine piezo stage. (c) Radial runout error measured using capacitive displacement sensors. (d) Scanning trajectory measured in the x-direction at a 40 Hz scanning frequency (blue solid line). The red dashed line demonstrates the selected trajectory.

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ISSN: 1600-5775
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