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Figure 3
(a) Calculated and measured photon flux at the mask normalized to a beam current of 300 mA. (b) Spectral purity of the photon beam at the endstation. |
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Figure 3
(a) Calculated and measured photon flux at the mask normalized to a beam current of 300 mA. (b) Spectral purity of the photon beam at the endstation. |