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Figure 6
(a) Scanning of a PMMA sheet mounted on the multi-axis exposure stage. (b) Exposure-dose dependence of the processing depth of the PMMA sheet for 1.5 GeV and 1.0 GeV operations. |
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Figure 6
(a) Scanning of a PMMA sheet mounted on the multi-axis exposure stage. (b) Exposure-dose dependence of the processing depth of the PMMA sheet for 1.5 GeV and 1.0 GeV operations. |