|
Figure 1
(a) Rendering of the FZP scanner (cap_s/l = capacitive sensor short/long axis; counter_s/l = counter mass short/long axis; piezo_s/l = one of the piezo elements short/long axis). (b) Photograph of the actual device. The ruler shows 1 cm. |
|
Figure 1
(a) Rendering of the FZP scanner (cap_s/l = capacitive sensor short/long axis; counter_s/l = counter mass short/long axis; piezo_s/l = one of the piezo elements short/long axis). (b) Photograph of the actual device. The ruler shows 1 cm. |