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Figure 1
(a) Rendering of the FZP scanner (cap_s/l = capacitive sensor short/long axis; counter_s/l = counter mass short/long axis; piezo_s/l = one of the piezo elements short/long axis). (b) Photograph of the actual device. The ruler shows 1 cm.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
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