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Figure 2
Typical movements of (a) and (b) the sample stage, (c) and (d) FZP scanner during a point-by-point scan. Panels (e) and (f) show the resulting effective motion of the sample relative to the FZP position versus time. The step response of the system can be improved by an order of magnitude and reaches less than 5 ms for an average step size of 0.6 µm. The standard deviation between time marks 3.7 s and 3.8 s in (f) is 6.6 nm.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 26| Part 2| March 2019| Pages 504-509
https://doi.org/10.1107/S160057751801785X
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