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Figure 4
SEM micrograph (55° angle of view) of a gold Fresnel zone plate with an outermost zone width of 60 nm, height of 1.1 µm and a diameter of 200 µm, with an integrated central stop. The stop diameter is 50 µm with a height of 17.3 µm (center) and 20.6 µm (edges). PMMA resist residues that are mostly transparent to X-rays can be seen.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 26| Part 2| March 2019| Pages 504-509
https://doi.org/10.1107/S160057751801785X
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