Figure 3
Geometrically optimized interface structures of β-tridymite SiO2/4H-SiC(Si-face) with nitrogen: (a) substitutional C site at the interface and (b) at the SiC interior; (c) interstitial sites at the SiC and (d) at the SiO2 side; (e) substitutional Si site at the SiC interior. Yellow, gray, red and blue denote the Si, C, O and N atoms, respectively. The crystal orientation for SiC is also depicted. |